VLSI Electronics microstructure science
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| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
New York :
Academic Press ,
1984
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| Subjects: | |
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Add Tag | Item Description: | V. 8: Plasma processing for VLSI. |
|---|---|
| Physical Description: | xiv, 527 p. |
| ISBN: | 0122341082 |
VLSI Electronics microstructure science