VLSI Electronics microstructure science

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Bibliographic Details
Other Authors:	Einspruch, Norman G., ed
Format:	Book
Language:	English
Published:	New York : Academic Press , 1985
Subjects:	Integrated circuits - Very large scale integration
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020		\|a 0122341112
041		\|a eng
082		\|2 21st ed. \|a 621.395 \|b VER.11
245		\|a VLSI Electronics microstructure science \|c edited by Norman G. Einspruch [and] William R. Wisseman \|v V.
260		\|a New York : \|b Academic Press , \|c 1985
300		\|a xii, 459 p.
500		\|a V. 11: Gas microelectronics.
653		\|a Integrated circuits - Very large scale integration
700		\|a Einspruch, Norman G., ed.
942		\|c EN \|2 ddc
999		\|c 10769 \|d 10769