VLSI Electronics microstructure science

VLSI Electronics microstructure science

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Bibliographic Details
Other Authors: Einspruch, Norman G., ed
Format: Book
Language:English
Published: New York : Academic Press , 1983
Subjects:
Integrated circuits - Very large scale integration
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Description
Item Description:V. 6. Materials and process characterization.
Physical Description:xii, 601 p.
ISBN:0122341066

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